Microsystems and Microactuators

Garant předmětu:

Lecturer:

Tutor:

Supervisor:

Department of Microelectronics

Synopsis:

The course deals with system integration applied in the design of digital and analog systems with application of system engineering, in i tis solved interconnection of various types of modern electronic systems on a chip as well as external. The course shows new possibilities of realization and application of integrated micro-components working with various physical principles and quantities using mainly MEMS technology, increasing reliability with all its attributes. The course introduces modern elements - microactuators with various principles of their activities including basic applications in industry, medicine, regulation, automotive control, etc. Basic elements of nanotechnology and nanoelectronic structures are mentioned here. The subject extends students' expertise with the latest multidisciplinary chip elements and their wide use in information technologies, IoT, biomedicine, aerospace, automotive industry etc.

Requirements:

Syllabus of lectures:

1. Microsystems structures, energy domains, importance, interdisciplinary, applications, system integration of digital and analog systems, multi-chip configuration

2. Physical phenomena, design methods, interconnection of systems-on-chip and external devices, process control, communication and evaluation, system reliability and its increasing by integration

3. Micro-actuators parameters, scaling

4. Tactile sensors and touch screens, biometric devices, from graphite to graphene

5. Basic mechanisms and structures used in micro-actuators

6. Electrostatic linear and rotary actuators components - basic physical principles and application

7. Electrostatic micromanipulators and micro-motors

8. Piezoelectric micro-actuators mechanisms, micro-motors and micromanipulators

9. Heat and magnetic principle - micro-actuators mechanisms

10. Mechanical Systems and micro-actuators mechanisms

11. Chemical and biochemical principles - micro-actuators mechanisms, intelligent microsystems structures for chemical and biochemical analysis, Lab-on-Chip

12. RF MEMS and MOEMS structures, (electronic switches, filters, optical switches, optical mirrors, tunable capacitors, etc.)

13. Micro-generators based on Energy Harvesting

14. Nanoscale systems

Syllabus of tutorials:

1. Introduction, organization of the seminars, introduction to safety in work

2. Introduction to the programs ANSYS/Coventorware

3. Simulation and modeling of basic MEMS structures in ANSYS /Coventorware

4. Simulation and modeling of basic MEMS structures in ANSYS /Coventorware

5. Design and Simulation and modeling of basic MEMS structures in ANSYS /Coventorware

6. Design and realization of microsystem structure in CTU/FEE technology (device purchased from the project 2018)

7. Design and realization of microsystem structure in CTU/FEE technology (device purchased from the project 2018)

8. Realization of microsystem structure in CTU/FEE technology (device purchased from the project 2018)

9. Realization of microsystem structure in CTU/FEE technology (device purchased from the project 2018)

10. Realization of microsystem structure (strain gauge) using the material printer

11. Characterization of realized the MEMS structures (device purchased from the project 2018)

12. Measurement of the MEMS structures (device purchased from the project 2018)

13. Presentation of semester projects

14. Presentation of semester projects

Study Objective:

Subject is organized in the form of lectures or consultations depending on the number of students enrolled. Lectures are focused on obtaining information about perspective directions of electronics, exercises are focused on design and realization of micro-systems related to the dissertation. Study materials, literature, hardware, and available software designs (running on a parallel computing cluster) are used for student work. The course is concluded with a presentation of the completed project accompanied by an oral examination.

Study materials:

Obligatory references:

[1] Arnaldo D Amico et al: Sensors and Microsystems, Springer 2014, EAN 97814 899 9944 3, ISBN 1489999442

[2] Senturia Stephen, Microsystem Design, Springer 2004, SBN-13: 978-0792372462

Recommended references:

[1] Tai-Ran Hsu: MEMS And Microsystems: Design And Manufacture, McGraw Hill Education; 2017, ISBN-13: 978-0070487093

[2] Chang Liu: Foundations of MEMS, Pearson Education 2011, ISBN-13: 978-8131764756

[3] Iniewski Krzysztof: Integrated Microsystems: Electronics, Photonics, and Biotechnology, CRC Press, 2017, ISBN 9781138076228

Doporučená literatura:

[1] Tai-Ran Hsu: MEMS And Microsystems: Design And Manufacture, McGraw Hill Education; 2017, ISBN-13: 978-0070487093

[2] Chang Liu: Foundations of MEMS, Pearson Education 2011, ISBN-13: 978-8131764756

[3] Iniewski Krzysztof: Integrated Microsystems: Electronics, Photonics, and Biotechnology, CRC Press, 2017, ISBN 9781138076228

Note:

Further information:

No time-table has been prepared for this course

The course is a part of the following study plans:

• Doctoral studies, daily studies (compulsory elective course)
• Doctoral studies, combined studies (compulsory elective course)