TCAD Tools Applications

Course guarantor:

Lecturer:

Tutor:

Supervisor:

Department of Microelectronics

Synopsis:

Fundamentals of the computer-aided technological design. Device simulators Atlas and Sentaurus: principle, applications. Basic equations. Boundary conditions. Numerical methods. Recombination models. Avalanche ionisation models. Mobility models. Hands-on exercises on SUN workstations according to the tasks of students' individual theses.

Requirements:

Solid-state physics

Syllabus of lectures:

1. Fundamentals of the computer-aided technological design

2. Technology simulators

3. Device simulator.

4. ATLAS: principle, applications

5. Basic equations

6. Boundary conditions

7. Numerical methods

8. Recombination models

9. Avalanche ionisation models

10. Mobility models

11. Mixed-mode simulation.

12. Heat-flow equation.

13. Simulation examples.

14.Practical exercises on SUN workstations according

to the tasks of students' individual theses.

Syllabus of tutorials:

See Annotation.

Study Objective:

Study materials:

T. Mouthaan, Semiconductor Devices Explained, Wiley, 1999

Note:

Further information:

https://moodle.fel.cvut.cz/course/view.php?id=3731

No time-table has been prepared for this course

The course is a part of the following study plans:

• Doctoral studies, daily studies (compulsory elective course)
• Doctoral studies, combined studies (compulsory elective course)
• Doctoral studies, structured daily studies (compulsory elective course)
• Doctoral studies, structured combined studies (compulsory elective course)