ACDRC MEMS Chip Technologies Workshop

Course guarantor:

Jiří Jakovenko

Lecturer:

Jiří Jakovenko

Tutor:

Vladimír Janíček

Supervisor:

Department of Microelectronics

Synopsis:

Requirements:

Syllabus of lectures:

Course Structure (3 Intensive Sessions):

This course is designed to take you from foundational understanding to practical simulation skills, providing a comprehensive insight into MEMS technology.

Session I: The Real World of MEMS - Chips, Design & Applications

What you'll explore: Get up close with tangible examples of real MEMS chips, including various sensors (e.g., accelerometers, pressure sensors) and actuators. We'll delve into their fundamental design principles, the intricate fabrication processes involved, essential testing methodologies, and their widespread applications across diverse industries.

Objective: To provide a solid foundational understanding and tangible insight into MEMS devices.

Session II: Mastering MEMS Design & Simulation - Step by Step

What you'll learn: Building on the understanding of physical devices from Session I, this session will guide you through the systematic process of designing MEMS devices. We will demystify the steps involved in conceptualizing and modeling these micro-scale systems, providing a clear, step-by-step explanation of simulation techniques.

Objective: To equip you with the theoretical knowledge required for MEMS design and simulation.

Session III: Hands-On MEMS Simulation Workshop

What you'll do: This is where theory meets practice! You will be divided into small groups and provided with laptops pre-loaded with simulation software. Under expert guidance, you'll get hands-on experience in simulating MEMS devices, applying the principles learned in Session II to practical design challenges.

Objective: To provide practical, guided experience in MEMS simulation using industry-relevant tools.

Syllabus of tutorials:

Study Objective:

Study materials:

Note:

Further information:

No time-table has been prepared for this course

The course is a part of the following study plans: