SEM and microbeam Analysis

Course guarantor:

Jaromír Kopeček

Lecturer:

Jaromír Kopeček

Tutor:

Supervisor:

Department of Solid State Engineering

Synopsis:

The aim of the lecture is to familiarize students with the work on scanning electron microscope (SEM) and the possibilities of bundle analytical methods available on such devices. With regard to physical principles, the display methods, analytical methods available on SEM and sampling techniques will be analyzed.

The student should be able to easily train on a specific device, after the necessary practical training to prepare a sample and choose the right technique for solving a specific problem, but also to make general orientation in the available experimental techniques.

Requirements:

The subject follows the basic knowledge from the structure of solids and physics.

Syllabus of lectures:

1. Electron microscopy, history and device design

2. Electron optics, image creation and signal detection

3. Techniques of observing non-conducting samples: low-voltage and low-vacuum microscopy

4. Generation of characteristic X-rays and their spectroscopy, detectors, detection areas

5. Energy-dispersive spectroscopy (EDS), spectrum processing and composition evaluation

6. Wave dispersion spectroscopy (WDS), X-ray fluorescence (XRF)

7. Ellectron back scattering (EBSD): Kikuchi lines, signal processing, Hough transformatio

8. Real crystal structure determination using EBSD, EDS / EBSD combined mapping, HR-EBSD using autocorrelation comparison of Kikuchi shapes, channeling (ECP)

9. Cathodoluminescence (CL) methods based on current measurement: Electron beam induced current (EBIC), AFM integration into SEM

10. Focused ion beam (FIB) integrated into SEM, device design, basic techniques, combined techniques: 3D reconstruction

11. Combined experiments in the SEM chamber: in-situ tables, deformation and temperature experiments

12. Preparation of samples: conventional metallography by grinding and polishing, electrochemical polishing, ion preparation of surfaces

Syllabus of tutorials:

Study Objective:

Study materials:

Note:

Time-table for winter semester 2025/2026:

Time-table is not available yet

Time-table for summer semester 2025/2026:

Time-table is not available yet

The course is a part of the following study plans: