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CZECH TECHNICAL UNIVERSITY IN PRAGUE
STUDY PLANS
2023/2024

Vacuum Technology

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Code Completion Credits Range
12VKT KZ 4 2P+2L
Vztahy:
It is not possible to register for the course 12VKT if the student is concurrently registered for or has already completed the course 12VAK (mutually exclusive courses).
Garant předmětu:
Vojtěch Petráček
Lecturer:
Richard Švejkar
Tutor:
Richard Švejkar
Supervisor:
Department of Laser Physics and Photonics
Synopsis:

Rarefied gasses: basic concepts and relations; diffusion,flow of rarefied gases. Flow and current of gas, conductivity. Interaction of gas with solid surface; sorption, desorption; gas transport through solid matter; evaporation, condensation;Vacuum generation: Pumping proces, Ultimative pressure, Pumping speedPumps and their properties:-Positive displacement pumps: Diaphragm, Sliding vane rotary, Diffusion, Molecular, Roots, Molecular and Turbomolecular pumps. Sorption pumps: Cryopumps, Cryo-Adsorption pumps, Sublimation and NEG pumps, Ion getter pumps..Vacuum measurements: vacuum gauges of total and partial pressure; pumping speed; gas flow, search for leaks. Materials and vacuum components and seals.Practical exercises.

Requirements:

Basics of thermodynamics.

Syllabus of lectures:

1. Basic concepts and relations of rarefied gas physics.

2. Pumping process.

3. Displacement pumps.

4. Sorption pumps.

5. Methods of vacuum measurements.

6. Materials and components of vacuum equipment.

Syllabus of tutorials:

1. Measurements with rotary vane pump.

2. Measurements with diffusion pump.

3. Measurements with cryosorption pump.

4. Turbomolecular pump and mass analysis of rest gas.

5. Methods of searching for leaks.

6. Vacuum physical vapour deposition.

Study Objective:

Knowledge of rarefied gases, generation and measurement of vacuum.

Ability to work with a simple vacuum equipment.

Study materials:

Obligatory:

[1]- Z.Češpíro - Vakuová technika, skriptum ČVUT v Praze; vydavatelství ČVUT, Praha, 1977.

[2]- J.Král - Cvičení z vakuové techniky, skriptum ČVUT v Praze; Vydavatelství ČVUT, Praha,2015.

Optional

[3]- J.Groszkowski - Technika vysokého vakua, SNTL Praha, 1981.in Czech.

[4]- S.Dushman - Scientific foundation of vacuum technique, Wiley & Sons, New York, 1962.

[5]- J.F. O´Hanlon - A User´s guide to vacuum technology, Wiley - Interscience; 2003.

Equipment of practice vacuum laboratory

Note:
Time-table for winter semester 2023/2024:
Time-table is not available yet
Time-table for summer semester 2023/2024:
Time-table is not available yet
The course is a part of the following study plans:
Data valid to 2024-07-16
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