Microsystems

Relations:

In order to register for the course BE2M34MST, the student must have registered for the required number of courses in the group BEZBM no later than in the same semester.

Course guarantor:

Miroslav Husák

Lecturer:

Miroslav Husák, Alexandr Laposa

Tutor:

Adam Bouřa

Supervisor:

Department of Microelectronics

Synopsis:

The course deals with system integration applied in the design of digital and analog systems. It demonstrates the new possibilities of implementation and application of integrated microelectronic devices based on various physical and biochemical principles. It presents primarily MEMS technology that increases reliability with all its attributes. The course presents the modern action elements and microactuators, whose operation is based on fundamental physical and biochemical principles, including basic applications in micromanipulation, microrobots, microdrives, microsurgery, multimedia, medical, industrial control, automotive, etc. In the course are presented the principles of touch screens, microgenerators of electrical energy. There are mentioned basic elements of the use of nanotechnology and nanoelectronic structures and basic microsystem technologies.

Requirements:

Syllabus of lectures:

1. Microsystems structures, energy domains, importance, interdisciplinary, applications, system integration of digital and analog systems, multi-chip configuration

2. Physical phenomena, design methods, interconnection of systems-on-chip and external devices, process control, communication and evaluation, system reliability and its increasing by integration

3. Micro-actuators parameters, scaling

4. Tactile sensors and touch screens, biometric devices, from graphite to graphene

5. Basic mechanisms and structures used in micro-actuators

6. Electrostatic linear and rotary actuators components - basic physical principles and application

7. Electrostatic micromanipulators and micro-motors

8. Piezoelectric micro-actuators mechanisms, micro-motors and micromanipulators

9. Heat and magnetic principle - micro-actuators mechanisms

10. Mechanical Systems and micro-actuators mechanisms

11. Chemical and biochemical principles - micro-actuators mechanisms, intelligent microsystems structures for chemical and biochemical analysis, Lab-on-Chip

12. RF MEMS and MOEMS structures, (electronic switches, filters, optical switches, optical mirrors, tunable capacitors, etc.)

13. Micro-generators based on Energy Harvesting

14. Nanoscale systems

Syllabus of tutorials:

1. Introduction, organization of the seminars, introduction to safety in work

2. Semester project selection, registration for excursion

3. Introduction to the programs Coventor and Ansys

4. Simulation and modeling of basic MEMS structures in Ansys

5. Simulation and modeling of basic MEMS structures in Ansys

6. Simulation and modeling of basic MEMS structures in Ansys, Preparation for excursion

7. Excursion, practical exercise in clean rooms

8. Simulation and modeling of basic MEMS structures in Ansys

9. Laboratory exercise - Application of the material printer

10. Laboratory exercise - Characterization of the fabricated structures

11. Measurement - practical applications of the MEMS structures

12. Presentation of semester projects

13. Presentation of semester projects

14. Additional measurements: completion of missing measurement tasks, assessment

Study Objective:

Gaining knowledge about the current and future development of systems on a chip, the integration of on-chip, electrical and non-electrical action systems, usage of basic physical phenomena for applications in electronics, optics, communications, medicine and aviation, in the realization of miniature generators from renewable energy sources - excluding the photovoltaics.

Study materials:

1. Fraden,J.: Handbook of modern sensors. American institut of physics, Woodbury 1997

2.Tuller,H.L, Microactuators, Kluwer 1998

Note:

Further information:

https://moodle.fel.cvut.cz/enrol/index.php?id=2074

Time-table for winter semester 2024/2025:

Time-table is not available yet

Time-table for summer semester 2024/2025:

	06:00–08:0008:00–10:0010:00–12:0012:00–14:0014:00–16:0016:00–18:0018:00–20:0020:00–22:0022:00–24:00
Mon	roomT2:B2-s141k Husák M. 12:45–14:15 (lecture parallel1) Dejvice roomT2:B2-s141k Husák M. 12:45–14:15 (lecture parallel1) Dejvice
Tue	roomT2:B2-s141a Bouřa A. 16:15–17:45 (lecture parallel1) Dejvice roomT2:C3-s143 Bouřa A. 16:15–17:45 (lecture parallel1) Dejvice
Wed
Thu
Fri

The course is a part of the following study plans:

• Electronics and Communications - Electronics (compulsory course in the program)
• Electronics and Communications - Technology of the Internet of Things (compulsory course in the program)