Characterization Techniques in Nanotechnologies

Garant předmětu:

Jan Remsa

Lecturer:

Jan Remsa

Tutor:

Jan Remsa

Supervisor:

Department of Natural Sciences

Synopsis:

Basic theory of viscous and molecular gas flow. Preparation and measurement of low pressures. Working principles and practical parameters of vacuum pumps, especially: rotary, Roots, membrane, cryosorption, turbomolecular. Gas pressure measurement in apparatus by different techniques: Pirani, Penning, McLeod, capacitance gauge. Materials for vacuum apparatuses and seals. Industrial and scientific applications requiring low pressure. Practical part will be conducted on real scientific devices.

Requirements:

Graded credit: making report from laboratory work, written test. Test consists of topics mentioned during lectures, and questions are focused on both theoretical principles and equipment parameters from laboratory.

Syllabus of lectures:

1. Introduction to low pressure physics

2. Theory of gas flow and basics of surface science.

3. Vacuum creation 1.

4. Measurement methods in vacuum technology.

5. Vacuum apparatuses.

6. Industrial and scientific applications of low pressure physics (Preparation and analysis of thin layers).

7. Focus on applications that students suggest (usually close to their master?s degree thesis).

Lectures take place during the first seven weeks (7x100minutes) in 101AL.

Syllabus of tutorials:

1. Introduction to apparatuses, safety at work.

2. Apparatus with a turbomolecular pump.

3. Finding leaks.

4. Apparatus with a membrane and cryosorption pump.

5. Apparatus with a rotary oil pump.

6. Apparatus with an oil diffusion pump.

7. Test.

Practical tasks run simultaneously with multiple groups. The maximum number is 4 groups of 2 students.

Study Objective:

After completion of this subject student will be able to work with different types of vacuum apparatuses, and will have necessary knowledge to design vacuum system for specific application.

Study materials:

[1] Chambers, A.:Modern vacuum physics / Boca Raton: Chapman&Hall/CRC, c2005. 341 s.: ISBN 0-8493-2438-6 (The newest book, available with me)

[2] O'Hanlon, John F., A user guide to vacuum technology / 3rd ed. Hoboken: Wiley, c2003. xviii, 516 s. : ISBN 0-471-27052-0 (Available at FNSPE CTU or with me)

[3] Pátý L., Petr J.: Vakuová technika. ČVUT Praha 1990

[4] Lectures - presentation in ppt is not complete. Some parts are discussed at the whiteboard (will be gradually completed)

[5] Vacuum technology compendium / Pfeiffer vacuum - student will receive it in digital form.

[6] Students will receive other materials according to their interests.

Note:

Further information:

No time-table has been prepared for this course

The course is a part of the following study plans: