Micro- and Nano-Technologies

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Department of Physics

Synopsis:

Definitions and introduction; micro - and nano - structures; quantum nature of the nanoworld; Schrödinger equation; qauntum states and energies; qauntum dots, quantum wires, nanolayers; self - assembled nanostructures in nature and industry; fullerenes, nanotubes; silicon technology; pattering, masks, photolithography; etching silicon; methods of deposition of metal and insulating films; optical and X-Ray lithography; electron-beam lithography; atomic force microscope (AFM); nanofabrication with an AFM.

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Study materials:

Wolf,E.L.: Nanophysics and Nanotechnology. Wiley-VCH,2004. Bhushan,B.: Handbook of Nanotechnology. Springer-Verlag,Berlin,2004

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Further information:

No time-table has been prepared for this course

The course is a part of the following study plans: