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CZECH TECHNICAL UNIVERSITY IN PRAGUE
STUDY PLANS
2020/2021

Vacuum Technology

The course is not on the list Without time-table
Code Completion Credits Range
12VKT KZ 4 2P+2L
The course cannot be taken simultaneously with:
Vacuum Physics and Technology (12VAK)
Lecturer:
Jaroslav Král, Richard Švejkar
Tutor:
Jaroslav Král, Richard Švejkar
Supervisor:
Department of Physical Electronics
Synopsis:

Rarefied gasses: basic concepts and relations; diffusion,flow of rarefied gases. Flow and current of gas, conductivity. Interaction of gas with solid surface; sorption, desorption; gas transport through solid matter; evaporation, condensation;Vacuum generation: Pumping proces, Ultimative pressure, Pumping speedPumps and their properties:-Positive displacement pumps: Diaphragm, Sliding vane rotary, Diffusion, Molecular, Roots, Molecular and Turbomolecular pumps. Sorption pumps: Cryopumps, Cryo-Adsorption pumps, Sublimation and NEG pumps, Ion getter pumps..Vacuum measurements: vacuum gauges of total and partial pressure; pumping speed; gas flow, search for leaks. Materials and vacuum components and seals.Practical exercises.

Requirements:

Basics of thermodynamics.

Syllabus of lectures:

1. Basic concepts and relations of rarefied gas physics.

2. Pumping process.

3. Displacement pumps.

4. Sorption pumps.

5. Methods of vacuum measurements.

6. Materials and components of vacuum equipment.

Syllabus of tutorials:

1. Measurements with rotary vane pump.

2. Measurements with diffusion pump.

3. Measurements with cryosorption pump.

4. Turbomolecular pump and mass analysis of rest gas.

5. Methods of searching for leaks.

6. Vacuum physical vapour deposition.

Study Objective:

Knowledge of rarefied gases, generation and measurement of vacuum.

Ability to work with a simple vacuum equipment.

Study materials:

Obligatory:

[1]- Z.Češpíro - Vakuová technika, skriptum ČVUT v Praze; vydavatelství ČVUT, Praha, 1977.

[2]- J.Král - Cvičení z vakuové techniky, skriptum ČVUT v Praze; Vydavatelství ČVUT, Praha,2015.

Optional

[3]- J.Groszkowski - Technika vysokého vakua, SNTL Praha, 1981.in Czech.

[4]- S.Dushman - Scientific foundation of vacuum technique, Wiley & Sons, New York, 1962.

[5]- J.F. O´Hanlon - A User´s guide to vacuum technology, Wiley - Interscience; 2003.

Equipment of practice vacuum laboratory

Note:
Further information:
No time-table has been prepared for this course
The course is a part of the following study plans:
Data valid to 2021-03-02
For updated information see http://bilakniha.cvut.cz/en/predmet6364506.html