Selected Methods of Surface Layers Modification and Diagnostics

The course is not on the list Without time-table
Code Completion Credits Range
W02OZ006 ZK 52P+26C
Garant předmětu:
Department of Physics

The course is focused on modern methods of diagnosis and modification of surface properties, both in terms of the processes employed in modern technologies and in terms of processes taking place in the modified material. Division of surface coatings modification, phase transformations, diffuse and phase nitridation, ion and plasma implantation, IBAD, IBM methods, ion sputtering, PVD, CVD and PACVD methods, plasma spraying. Diagnostic methods of surface coatings: phase analysis, XRD, LEED and RHEED. Methods of diagnosis of surface coatings composition: EPMA, AES, GDOES, RBS, ERDA, SIMS.

•Surface characteristics and phase transformations.

•Surface diffusion effects, gas and plasma interactions with surfaces.

•Advanced methods of nitriding and carbonization of technical materials.

•IBAD (Ion Beam Assisted Deposition) method and IBM (Ion Beam Modification) method.

•PVD (Physical Vapour Deposition) methods and magnetron sputtering.

•CVD (Chemical Vapour Deposition) a PA CVD (Plasma Assisted CVD) methods.

•Difraction of electron and X-ray on surfaces, XRD (X-Ray Diffraction).

•Aplication of electron difraction, LEED (Low Energy Electron Diffraction), RHEED.

•EPMA (Electron Probe Microanalysis), principle and method possibilities.

•AES (Auger Electron Spectroscopy), GDOES (Glow Discharge Optical Emission Spectroscopy), principle and

methods possibilities.

•RBS (Rutherford Backscattering Spectroscopy), ERDA (Elastic Recoil Electron Analysis),

principle and methods possibilities.

•SIMS (Secondary Ion Mass Spectrometry), principle and method possibilities. Summary of analytical methods.

Practice is focused on practical knowledge of selected methods of modification, deposition and characterization of nanostructures. 1. Ion implantation, 2. Ion beam assited deposition, 3. Plasma enhanced chemical vapour deposition, 4. XRD structural analysis.

Syllabus of lectures:
Syllabus of tutorials:
Study Objective:
Study materials:

•Martin, P. M.: Handbook of Deposition Technologies for Films and Coatings : Science, Applications and

Technology. William Andrew 2009, ISBN number:9780815520313;

•Pauleau, Y.: Materials Surface Processing by Directed Energy Techniques, Elsevier Science & Technology 2006, ISBN: ISBN number:9780080444963;

•Leng, Y.: Materials Characterization : Introduction to Microscopic and Spectroscopic Methods John Wiley & Sons, Incorporated 2013, ISBN: ISBN number:9783527334636;

•Czanderna, A. W., Madey, T. E., Powell, C. J. et al.: Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis, Kluwer Academic Publishers 1998, ISBN: ISBN number:9780306458965

Further information:
No time-table has been prepared for this course
The course is a part of the following study plans:
Data valid to 2024-06-16
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