Vacuum technology

Garant předmětu:

Lecturer:

Tutor:

Supervisor:

Department of Physics

Synopsis:

Course description : The aim of this course is to get basic knowledge for understanding of modern vacuum technologies applied in engineering. The kinetic theory of gases in the range of low pressures and description of interaction of gases with walls of vacuum systems are presented in the first part of the course. The following part deals with the basic laws of low pressure gaining and with the principles of vacuum pumps. The measurements of total and partial low pressures is terated in the following part and the lůast part is devoted to the application of vacuum technology in engineering.

Requirements:

Kinetic theory of gases, transport phenomane in gases, electrical properties of solid and gases - on the level of basic course in physics.

Syllabus of lectures:

1.Importance of vacuum technology in science and engineering. Kinetic picture of a gas,

pressure, mean free path, pressure ranges in vacuum technology, units.

2.Elementary gas transport phenomena, gas flow regimes.

3.Surface processes: gas release of solids, adsorption isotherms.

4.Saturated vapour pressure, Vaporization. Materials applied in vacuum technology.

5.Low pressure production: pumping speed, pumping process time-dependence, residual

gas, pressure distribution in vacuum system.

6.Mechanical pumps, rotary vane and rotary piston pumps, dry pumps, scroll pumps.

7.Roots pumps, molecular and turbomolecular pumps.

8.Water and vapour ejector pumps, diffusion pumps. Getter and ion pumps, cryogenic

pumps.

9.Priciples of vacuum systems design.

10.Low pressure measurements: diaphgram and capacitance manometers, thermal

conductivity gauges, ionization gauges.

11. Partial pressure measurements, residual gas analyzers, leak detection in vacuum ¨

systems.

12.Joints, seals and valves, motion transport to vacuum.

13.Principles of vacuum system utiliziation, vacuum hygienics.

Syllabus of tutorials:

1.Examples of vacuum system application in engineering, basic computation in the

range of low pressure of gases.

2.Vacuum conductivity of actual vacuum systems, examples of gas release of solids.

3.Mesurement of pumping speed of a rotary vane pump.

4.Comparative measurements with different principles vacuum gauges.

5.Leak detection on a vacuum system.

6.Example of vacuum technology application in engineering: thin film deposition by

PVD.

7.Design and computing of a substantial vacuum system.

Study Objective:

Course description : The aim of this course is to get basic knowledge for understanding of modern vacuum technologies applied in engineering. The kinetic theory of gases in the range of low pressures and description of interaction of gases with walls of vacuum systems are presented in the first part of the course. The following part deals with the basic laws of low pressure gaining and with the principles of vacuum pumps. The measurements of total and partial low pressures is terated in the following part and the lůast part is devoted to the application of vacuum technology in engineering.

Study materials:

O´Hanlon, J.F.: A userś guide to vacuum technology, Wiley, N.Y., 2003

Roth, A.: Vacuum Technology, North-holland, 2002

Note:

Further information:

No time-table has been prepared for this course

The course is a part of the following study plans: