Microsystems in Multimedia

The course is not on the list Without time-table
Code Completion Credits Range Language
A2M34MIM Z,ZK 5 2P+2C Czech
In order to register for the course A2M34MIM, the student must have registered for the required number of courses in the group BEZBM no later than in the same semester.
Garant předmětu:
Department of Microelectronics

The subject solves systems working in interdisciplinary areas, the most frequently in the energy interface - optical, thermal, mechanical, electrical). There are explained physical principles of any sensors, especially of optical and mechanical quantities, principle of biometric pick-up information, principle of tactile display, etc. There re solved the basic methods of the signal pre-processing. Basic principles of actuators are described, ones are using for the control in instruments and systems of multimedia applications. The attention is focused on MEMS elements and systems and their applicability in modern instrument technology.

Syllabus of lectures:

1.The concept of microsystems, microsystems structures, energy domains, scaling

2.Basic physical principles

3.Special sensors of optical and mechanical quantities, the use of integration of semiconductor elements, biometric sensors

4.Tactile sensors, operation principles of touch displays

5.Sensor signal pre-processing

6.The sensor communication with control units, the actuator control

7.Actuators and microactuators - physical principles and properties

8.MEMS structures

9.MEMS microspectrometer structure, special elements (electronic switches, filters, optical switches, the tunable capacity, another RF elements)

10.Electrostatic and piezoelectric microactuators

11.Magnetic microactuators, thermal actuators

12.Optical microactuators, mechanical microactuators

13.Manipulators and micromotors, used to control, microshifts, etc.

14.Microsystems product applications in the instrument design (cameras, moving cameras, studio equipments, etc.)

Syllabus of tutorials:

1.The time schedule, the security in laboratory, the system engineering, the system integration

2.The calculation of the system reliability

3.CoventorWare software for the microsystem structure design

4.Biometric sensors

5.Touch displays

6.The electrostatic microactuator and micromotor

7.The electrostatic manipulator

8.The electrostatic optical switch

9.The electrostatic MEMS microphone and speaker

10.The piezoelectric actuator and microshift

11.The thermal actuator

12.The magnetic actuator

13.The design of MEMS switches


Study Objective:
Study materials:

1.Tuller,H.L, Microactuators, Kluwer 1998

2.Busch-Vishniac,I.,J.: Electromechanical Sensors and Actuators, Springer, 2003

Further information:
No time-table has been prepared for this course
The course is a part of the following study plans:
Data valid to 2024-06-16
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