Selected Methods of Modification and Diagnostics of Surface Layers

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Code Completion Credits Range
W02O007 ZK 4P+1C
Garant předmětu:
Department of Physics

Outline of methods for surface layers modification: phase transformations, diffusion and plasma nitridation, ion and plasma implantation, IBAD, IBM and ion sputtering, PVD, CVD and PACVD, plasma spraying. Outline of methods for surface layers diagnostics: phase analysis, XRD, LEED and RHEED. Methods for investigation of surface layers chemical composition: EPMA, AES, GDOES, RBS, SIMS.


Understanding physics and material engineering, both on the level of basic courses.

Syllabus of lectures:

1.Characterization of solid state surfaces, phase transformations.

2.Diffusion in solids, gases and plasma interactions with surfaces of solids.

3.Nitridation and carbonization of technical materials.

4.Methods IBAD (Ion Beam Assisted Deposition) and IBM (Ion Beam Modification).

5.PVD (Physical Vapour Deposition) - evaporation and magnetron sputtering.

6.CVD (Chemical Vapour Deposition) and PA CVD (Plasma Assisted CVD).

7.X-Ray and electron beams diffraction on surfaces of solids.

8.Application of elelctron bemas diffraction, LEED (Low Energy Electron Diffraction), RHEED.

9.EPMA (Electron Probe Microanalysis), principles and potentialities of this method.

10.AES (Auger Electron Spectroscopy), GDOES (Glow Discharge Optical Emission Spectroscopy),principles and potentialities of these methods.

11.RBS (Rutherford Backscattering Spectroscopy), ERDA (Elastic Recoil Electron Analysis),

principles and potentialities of these methods.

12.SIMS (Secondary Ion Mass Spectrometry), principle and potentialities of this method. Summary of analytical methods.

Syllabus of tutorials:

1.Measurements of parameters of solids: microhardness and nanohardness, elastics constants.

2.Measurements of parameters of coatings : adhesion, thickness.

3.Coating deposition with IBAD.

4.Coating deposition with evaporation and magnetron sputtering.

5.Coating deposition with PA CVD.

6.Teach-in of XRD application.

7.Excursion at a specialized laboratory.

8.Excursion at a specialized laboratory.

Study Objective:

To make PhD. students acquainted with physical methods of surface layers modifications applied on surfaces of technical materials. Accentuation of the methods applicable in engineering production. To learn principles and feasibilities of advanced methods for diagnostics and measurements of surface layers properties.

Study materials:

Wachtman,J.B; Haber,R.A.: Ceramic Films and Coatings, Noyes Publications, Park Ridge, 1993 Bunshah,R.F.: Handbook of Hard Coatings, Noyes Publications, Park Ridge,2001

Sedláček V., Metallic Surfaces, Films and Coatings, Elsevier 1992

Further information:
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The course is a part of the following study plans:
Data valid to 2023-08-30
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