Microsystems

Lecturer:

Miroslav Husák (gar.), Adam Bouřa, Pavel Kulha

Tutor:

Miroslav Husák (gar.), Adam Bouřa, Pavel Kulha

Supervisor:

Department of Microelectronics

Synopsis:

The subject solves the system integration in the design of the digital as well as analogue systems with help of an system engineering, one solves a connection of a different types of the modern electronic systems on-chip as well as a external. There are showed the new possibilities of a realisation and the application of the integrated elements operated by the different principles in the subject. Integrated elements are designed primarily in MEMS technologies. The subject involves a reliability of the systems. There are introduced the modern elements - microactuators operated on the different principles including the basic applications in the industry, medicine, control, automotive, etc. The basic nanotechnology elements and structures for the electronics are discussed.

Requirements:

Syllabus of lectures:

1.The system integration of the digital and the analogue systems

2.Design methods, the connection on the chip as well as external

3.The design control, the communication and the evaluation

4.The reliability of systems, the reliability enhance (integration)

5.The integration, material properties, the multichip arrangement

6.Microsystems, the microsystems structures, energy domains

7.Actuators - main used physical and biochemical principles, scaling

8.MEMS and MOEMS structures, structures of MEMS elements as well as RF elements (electronic switches, filters, optical switches, tunable capacity, etc.)

9.Electrostatic linear and rotary actuators, manipulators and micromotors

10.Piezoelectric microactuators, manipulators and micromotors

11.Magnetic and temperature actuators

12.Optical and mechanical microactuators and microdrivers

13.Tactile sensors, touch displays, biometric elements

14.Microsystems technologies including MEMS

Syllabus of tutorials:

1.The time schedule, the security in laboratory, the system engineering, the system integration

2.The calculation of the system reliability

3.The design of multichip connection, EMC on the chip as well as on the integrated system

4.CoventorWare software for the microsystem structure design

5.The practical design of structures by support of CoventorWare (cantilever, membrane)

6.The electrostatic microactuator and micromotor

7.The electrostatic manipulator

8.The electrostatic optical switch

9.The electrostatic MEMS microphone and speaker

10.The piezoelectric actuator and microshift

11.The thermal actuator

12.The magnetic actuator

13.The design of MEMS switches

14.Credits

Study Objective:

Study materials:

1.Tuller,H.L, Microactuators, Kluwer 1998

2.Busch-Vishniac,I.,J.: Electromechanical Sensors and Actuators, Springer, 2003

Note:

Time-table for winter semester 2011/2012:

Time-table is not available yet

Time-table for summer semester 2011/2012:

	06:00–08:0008:00–10:0010:00–12:0012:00–14:0014:00–16:0016:00–18:0018:00–20:0020:00–22:0022:00–24:00
Mon	roomT2:C3-54 Husák M. 12:45–14:15 (lecture parallel1) Dejvice Poslucharna
Tue	roomT2:B2-s141a Bouřa A. Kulha P. 12:45–14:15 (lecture parallel1 parallel nr.101) Dejvice učebna CEMISroomT2:B2-s141a Bouřa A. Kulha P. 14:30–16:00 (lecture parallel1 parallel nr.102) Dejvice učebna CEMIS
Fri
Thu
Fri

The course is a part of the following study plans:

• Komunikace, multimedia a elektronika - Elektronika (compulsory course of the specialization)
• Komunikace, multimédia a elektronika - Komunikační systémy (compulsory course of the specialization)