Microsystems

Lecturer:

Tutor:

Supervisor:

Department of Microelectronics

Synopsis:

Fundamental definitions and characteristics of microsystems. Microsensors and microactuators - basic principles of operation, structures and materials. Intelligent microsystems, design, simulations and modelling, data processing in microsystems. Microactuator functions, structures and behaviours. individual principles of microsystems, electrical, magnetic, thermal, optic (MOEMS), mechanical (MEMS), chemical and biochemical principles and combinations (MOES, MEMOS). Microsystem technologies. Microsystems applications in medicine and industry.

Requirements:

Syllabus of lectures:

1. Microsystem. Basic physical principles of microsensor and microactuator. Parameters, structures, materials.

2. Basic behaviour of microsystems

3. Temperature microsensor. Integrated CMOS and bipolar microstructures

4. Microsensor for mechanical quantity measurement. Pressure , shift, microflow, acceleration, etc.

5. Microsensor for radiation measurement, chemical and biochemical quantity measurement.

6. Microsensors for magnetic quantity measurement. Magnetoresistor, Hall and ferromagnetic sensor

7. Electrical microactuators. Electrostatic, resonance, piezoelectric

8. Temperature and mecanical microactuators. MEMS, gass and solid material expansion, ultrasonic

9. Chemical and biochemical, optic microactuators (MOEMS), magnetic microactuators

10. Sensor and actuator signal processing

11. Intelligent microsensors and microactuators. Inner subsystems, intelligence realisation

12. Microsystem design and information. Design methology, hardware and software design

13. Technologies of microsystems realisation

14. Microsystem applications in medical and industry. Micromotor, microrelays, microswitchs, microinstruments.

Syllabus of tutorials:

1. Electrical properties of microsensors

2. Electrical properties of microactuators

3. Signal processing in microsensors

4. Temperature microsensors

5. Pressure microsensors

6. Capacitive microsensors

7. Modelling and simulation of temperature and electrical behaviour

8. Modelling and simulation of MEMS structure temperature behaviour

9. Modelling and simulation of MEMS structure mechanical behaviour

10. Temperature microsensor design

11. Electrostatic microactuator design

12. Matrix of electrostatic driven micromirrors

13. Magnetic microsensors

14. Piezoelectric microactuators

Study Objective:

Study materials:

1. Husák, M.: Microsystems. Academia 2002.

2. Ďaďo, S., Kreidl, M.: Sensors and measure circuits. ČVUT, Prague 1996

3. J. Fraden: Handbook of modern sensors,2nd ed. , Springer Verlag, 1997

Note:

Further information:

No time-table has been prepared for this course

The course is a part of the following study plans:

• Economics and Management in Electrical Engineering- structured studies (compulsory course)