Microsystems

Lecturer:

Miroslav Husák (gar.)

Tutor:

Miroslav Husák (gar.)

Supervisor:

Department of Microelectronics

Synopsis:

Fundamental concepts and classification of microsystems. Micro-sensors. Micro-actuators. Signal processing within the system. MEMS (micro-electrical-mechanical structures). MOES (micro-optical-electrical structures). MEMOS (micro-electrical-mechanical-optical structures). Microsystem design. Microsystem modelling. Manufacturing technologies. Materials. Industrial applications. Medical applications.

Requirements:

c

Syllabus of lectures:

1. Fundamental concepts and classification of microsystems

2. Microsystems within the European research and their market chances

3. Micro-sensors

4. Micro-actuators

5. Signal processing within the system

6. MEMS (micro-electrical-mechanical structures)

7. MOES (micro-optical-electrical structures)

8. MEMOS (micro-electrical-mechanical-optical structures)

9. Microsystem design

10. Microsystem modelling

11. Manufacturing technologies

12. Materials

13. Industrial applications

14. Medical applications

Syllabus of tutorials:

n

Study Objective:

Study materials:

1. Beeby,S., Ensell,G., Kraft,M., White,N.: MEMS Mechanical Sensors. Artech

House, Boston, 2004.

2. Pelesko,J.A., Bernstein,D.H.: Modeling MEMS and NEMS. Chapman & Hall/CRC,

Boca Raton, 2003.

3. Varadan,V.K., Vinoy,K.J., Jose,K.A.: RF MEMS and their applications.

Wiley, Chichester, 2003.

Note:

Time-table for winter semester 2011/2012:

Time-table is not available yet

Time-table for summer semester 2011/2012:

Time-table is not available yet

The course is a part of the following study plans:

• Doctoral studies, daily studies (compulsory elective course)
• Doctoral studies, combined studies (compulsory elective course)
• Doctoral studies, structured daily studies (compulsory elective course)
• Doctoral studies, structured combined studies (compulsory elective course)