Vacuum physics and technology

Lecturer:

Jaroslav Král (gar.)

Tutor:

Jaroslav Král (gar.), Jan Remsa

Supervisor:

Department of Physical Electronics

Synopsis:

Rarefied gasses: basic concepts and relations; flow of rarefied gas. Interaction of gas with surface of solid surface; sorption, desorption; evaporation, condensation; gas transport through solid matter;

Vacuum generation. Pumping process. Pumps.Vacuum measurements: vacuum gauges of total and partial pressure; pumping speed; gas flow, conductivity, searching for leaks. Materials and vacuum instalation parts.

Practical exercises.

Requirements:

Elements of thermodynamics.

Syllabus of lectures:

- Basic concepts and relations of rarefied gas physics.

- Pumping process.

- Transporg pumps.

- Sorption pumps.

- Methods of vacuum measurements.

- Materials annd building parts of vacuum equipment.

Syllabus of tutorials:

- Measurements with rotary vane pump.

- Measurements with diffusion pump.

- Measurements with cryosorption pump.

- Turbomolecular pump and mass analysis of rest gas.

- Methods of searching for leaks.

- Vacuum physical vapour deposition.

Study Objective:

Knowledge of rarefied gases, generation and measurement of vacuum.

Ability to work with a simple vacuum equipment.

Study materials:

Obligatory:

[1]- Z.Češpíro - Vakuová technika, skriptum ČVUT v Praze; vydavatelství ČVUT, Praha, 1977.

[2]- J.Král - Cvičení z vakuové techniky, skriptum ČVUT v Praze; Vydavatelství ČVUT, Praha, 1996.

Optional

[3]- J.Groszkowski - Technika vysokého vakua, SNTL Praha, 1981.in Czech.

[4]- S.Dushman - Scientific foundation of vacuum technique, Wiley & Sons, New York, 1962.

[5]- J.F. O´Hanlon - A User´s guide to vacuum technology, Wiley - Interscience; 2003.

Equipment of practice vacuum laboratory

Note:

Time-table for winter semester 2011/2012:

Time-table is not available yet

Time-table for summer semester 2011/2012:

Time-table is not available yet

The course is a part of the following study plans: