Vacuum Technology

Course guarantor:

Vojtěch Petráček

Lecturer:

Richard Švejkar

Tutor:

Richard Švejkar

Supervisor:

Department of Laser Physics and Photonics

Synopsis:

Rarefied gasses: basic concepts and relations; diffusion,flow of rarefied gases. Flow and current of gas, conductivity. Interaction of gas with solid surface; sorption, desorption; gas transport through solid matter; evaporation, condensation;Vacuum generation: Pumping proces, Ultimative pressure, Pumping speedPumps and their properties:-Positive displacement pumps: Diaphragm, Sliding vane rotary, Diffusion, Molecular, Roots, Molecular and Turbomolecular pumps. Sorption pumps: Cryopumps, Cryo-Adsorption pumps, Sublimation and NEG pumps, Ion getter pumps..Vacuum measurements: vacuum gauges of total and partial pressure; pumping speed; gas flow, search for leaks. Materials and vacuum components and seals.Practical exercises.

Requirements:

Requirements for obtaining a graded credit:

The final evaluation consists of the grades from the individual reports and the subsequent discussion about each report.

Even if all reports are graded as Excellent, the grade may be lowered if the student does not demonstrate knowledge and understanding of the subject during the discussion. The student must demonstrate knowledge of the subject!

Each student submits their own reports individually.

The student must complete all practical tasks and submit the corresponding reports.

Reports must be submitted in PDF format by email to richard.svejkar@cvut.cz

Reports must be submitted before the start of the next practical session.

For each day of delay, including submission after the start of the laboratory, the grade will be lowered by one level.

None of the reports may be graded F.

Syllabus of lectures:

1. Basic concepts and relations of rarefied gas physics.

2. Pumping process.

3. Displacement pumps.

4. Sorption pumps.

5. Methods of vacuum measurements.

6. Materials and components of vacuum equipment.

Syllabus of tutorials:

1. Measurements with rotary vane pump.

2. Measurements with diffusion pump.

3. Measurements with cryosorption pump.

4. Turbomolecular pump and mass analysis of rest gas.

5. Methods of searching for leaks.

6. Vacuum physical vapour deposition.

Study Objective:

Knowledge of rarefied gases, generation and measurement of vacuum.

Ability to work with a simple vacuum equipment.

Study materials:

Obligatory:

[1]- Z.Češpíro - Vakuová technika, skriptum ČVUT v Praze; vydavatelství ČVUT, Praha, 1977.

[2]- J.Král - Cvičení z vakuové techniky, skriptum ČVUT v Praze; Vydavatelství ČVUT, Praha,2015.

Optional

[3]- J.Groszkowski - Technika vysokého vakua, SNTL Praha, 1981.in Czech.

[4]- S.Dushman - Scientific foundation of vacuum technique, Wiley & Sons, New York, 1962.

[5]- J.F. O´Hanlon - A User´s guide to vacuum technology, Wiley - Interscience; 2003.

Equipment of practice vacuum laboratory

Note:

obligatory subject

Time-table for winter semester 2025/2026:

Time-table is not available yet

Time-table for summer semester 2025/2026:

Time-table is not available yet

The course is a part of the following study plans:

• Quantum Technologies (elective course)
• Nuclear and Particle Physics (elective course)
• Physical Engineering - Plasma Physics and Thermonuclear Fusion (PS)
• Physical Engineering - Solid State Engineering (elective course)
• Physical Engineering - Laser Technology and Photonics (elective course)