Scanning Electron Microscopy and Microbeam Analysis Methods

Garant předmětu:

Jaromír Kopeček

Lecturer:

Jaromír Kopeček

Tutor:

Jaromír Kopeček

Supervisor:

Department of Solid State Engineering

Synopsis:

The aim of the lecture is to familiarize students with the work on scanning electron microscope (SEM) and the possibilities of bundle analytical methods available on such devices. With regard to physical principles, the display methods, analytical methods available on SEM and sampling techniques will be analyzed.

The student should be able to easily train on a specific device, after the necessary practical training to prepare a sample and choose the right technique for solving a specific problem, but also to make general orientation in the available experimental techniques.

Requirements:

The subject follows the basic knowledge from the structure of solids and physics.

Syllabus of lectures:

1. Electron microscopy, history and device design

2. Electron optics, image creation and signal detection

3. Techniques of observing non-conducting samples: low-voltage and low-vacuum microscopy

4. Generation of characteristic X-rays and their spectroscopy, detectors, detection areas

5. Energy-dispersive spectroscopy (EDS), spectrum processing and composition evaluation

6. Wave dispersion spectroscopy (WDS), X-ray fluorescence (XRF)

7. Ellectron back scattering (EBSD): Kikuchi lines, signal processing, Hough transformatio

8. Real crystal structure determination using EBSD, EDS / EBSD combined mapping, HR-EBSD using autocorrelation comparison of Kikuchi shapes, channeling (ECP)

9. Cathodoluminescence (CL) methods based on current measurement: Electron beam induced current (EBIC), AFM integration into SEM

10. Focused ion beam (FIB) integrated into SEM, device design, basic techniques, combined techniques: 3D reconstruction

11. Combined experiments in the SEM chamber: in-situ tables, deformation and temperature experiments

12. Preparation of samples: conventional metallography by grinding and polishing, electrochemical polishing, ion preparation of surfaces

Syllabus of tutorials:

N/A

Study Objective:

The aim of the lecture is to acquaint students with the work on scanning electron microscope (SEM) and the possibilities of bundle analytical methods available on such devices. With regard to physical principles, the display methods, analytical methods available on SEM and sampling techniques will be analyzed.

The student should be able to easily train on a specific device, after the necessary practical training to prepare a sample and choose the right technique for solving a specific problem, but also to make general orientation in the available experimental techniques.

Study materials:

Compulsory literature:

Scanning Electron Microscopy Physics of Image Formation and Microanalysis, Ludwig Reimer, ISBN: 978-3-642-08372-3 Springer-Verlag Berlin Heidelberg 1985, 1998

Recommended literature:

Scanning Electron Microscopy and X-Ray Microanalysis, J. I. Goldstein, D. E. Newbury, P. Echlin, D. C. Joy, A. D. Romig Jr., Ch. E. Lifshin, ISBN-13: 978-0306472923, Plenum Press, New York, 1992, 1981

Handbook of Sample Preparation for Scanning Electron Microscopy and X-Ray Microanalysis - Patrick Echlin, ISBN: 0387857303, Springer Science+Business Media, LLC 2009

Electron Backscatter Diffraction in Materials Science,

Adam J. Schwartz, Mukul Kumar, Brent L. Adams, David P. Field, 2nd Edition, ISBN 978-0-387-88135-5, Springer Science+Business Media, LLC 2009

Introduction to Focused Ion Beams Instrumentation, Theory, Techniques and Practice, Lucille A. Giannuzzi , Fred A. Stevie, ISBN: 0-387-23116-1, Springer Science + Business Media, Inc., 2005

Note:

Time-table for winter semester 2023/2024:

Time-table is not available yet

Time-table for summer semester 2023/2024:

Time-table is not available yet

The course is a part of the following study plans:

• Fyzikální elektronika - Fotonika (elective course)
• Inženýrství pevných látek (elective course)