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CZECH TECHNICAL UNIVERSITY IN PRAGUE
STUDY PLANS
2019/2020

Ion Beam Technology

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Code Completion Credits Range
D12TIS ZK
Lecturer:
Tomáš Škereň (guarantor), Jaroslav Král (guarantor)
Tutor:
Supervisor:
Department of Physical Electronics
Synopsis:

Technical problems of generation and formation of ion beams. Ion sources, elements of ion optics, measuring

along the beam and at the target. Design and construction of building elements of equipment for ion irradiation and analyses.

Requirements:
Syllabus of lectures:

1. Ion sources, extraction and formation of ion beam and the beam characteristics.

2. Elůements of ion optics, lenses, bending magnets, electrostatic prismas, mirrors, deflecting and scanning systems, mass selectors, energy analyzers.

3. Monitoring and measurement of beam on the target.

4. Construction materials and materials for ionization.

5. Facilities for ion beam applications.

Syllabus of tutorials:
Study Objective:

Knowledge of ion beam preparation technology, properties

of various ion sources, elements of ion optics and basic technical aspects of ion beam equipments for ion beam application.

Study materials:

Obligatory

[1] J. Král - Technika pro iontové svazky - text přednášky v elektronické formě.

[2] L. Frank, J. Král (Eds.) - Metody analýzy povrchů III.

Iontové, sondové a speciální metody. Academia, 2002.

Recommended

[3] A. Septier - Focusing of charged particles,

Academic Press, 1967.

[4] R. Behrisch, W. Eckstein (Eds) Sputtering of particle

bombardment. Topics in Applied Physics (Book 110),

Springer Verlag, 2007.

[5] L.C. Feldman, J.W. Mayer / Fundamentals of Surface and Thin Film Analysis, North Holland, 1986.

Note:
Time-table for winter semester 2019/2020:
Time-table is not available yet
Time-table for summer semester 2019/2020:
Time-table is not available yet
The course is a part of the following study plans:
Data valid to 2019-12-14
For updated information see http://bilakniha.cvut.cz/en/predmet4581206.html