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CZECH TECHNICAL UNIVERSITY IN PRAGUE
STUDY PLANS
2019/2020

Microsystems

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Code Completion Credits Range Language
XP34MSY ZK 4 2P+2C Czech
Lecturer:
Miroslav Husák (guarantor)
Tutor:
Miroslav Husák (guarantor)
Supervisor:
Department of Microelectronics
Synopsis:

Fundamental concepts and classification of microsystems. Micro-sensors. Micro-actuators. Signal processing within the system. MEMS (micro-electrical-mechanical structures). MOES (micro-optical-electrical structures). MEMOS (micro-electrical-mechanical-optical structures). Microsystem design. Microsystem modelling. Manufacturing technologies. Materials. Industrial applications. Medical applications.

Requirements:

c

Syllabus of lectures:

1. Fundamental concepts and classification of microsystems

2. Microsystems within the European research and their market chances

3. Micro-sensors

4. Micro-actuators

5. Signal processing within the system

6. MEMS (micro-electrical-mechanical structures)

7. MOES (micro-optical-electrical structures)

8. MEMOS (micro-electrical-mechanical-optical structures)

9. Microsystem design

10. Microsystem modelling

11. Manufacturing technologies

12. Materials

13. Industrial applications

14. Medical applications

Syllabus of tutorials:

n

Study Objective:
Study materials:

1. Beeby,S., Ensell,G., Kraft,M., White,N.: MEMS Mechanical Sensors. Artech

House, Boston, 2004.

2. Pelesko,J.A., Bernstein,D.H.: Modeling MEMS and NEMS. Chapman & Hall/CRC,

Boca Raton, 2003.

3. Varadan,V.K., Vinoy,K.J., Jose,K.A.: RF MEMS and their applications.

Wiley, Chichester, 2003.

Note:
Further information:
https://moodle.fel.cvut.cz/course/view.php?id=3724
Time-table for winter semester 2019/2020:
06:00–08:0008:00–10:0010:00–12:0012:00–14:0014:00–16:0016:00–18:0018:00–20:0020:00–22:0022:00–24:00
Mon
Tue
Fri
Thu
roomT2:B2-s141a
Husák M.
12:45–16:00
(lecture parallel1)
Dejvice
učebna CEMIS
Fri
Time-table for summer semester 2019/2020:
06:00–08:0008:00–10:0010:00–12:0012:00–14:0014:00–16:0016:00–18:0018:00–20:0020:00–22:0022:00–24:00
Mon
Tue
Fri
roomT2:B2-s141k
Husák M.
14:30–17:45
(lecture parallel1)
Dejvice
Cvičebna
Thu
Fri
The course is a part of the following study plans:
Data valid to 2020-01-20
For updated information see http://bilakniha.cvut.cz/en/predmet11432204.html