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CZECH TECHNICAL UNIVERSITY IN PRAGUE
STUDY PLANS
2020/2021

Micro- and Nano-Technologies

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Code Completion Credits Range
W02O003 ZK 4P+1C
Lecturer:
Petr Vlčák
Tutor:
Petr Vlčák
Supervisor:
Department of Physics
Synopsis:

Definitions and introduction; micro - and nano - structures; quantum nature of the nanoworld; Schrödinger equation; qauntum states and energies; qauntum dots, quantum wires, nanolayers; self - assembled nanostructures in nature and industry; fullerenes, nanotubes; silicon technology; pattering, masks, photolithography; etching silicon; methods of deposition of metal and insulating films; optical and X-Ray lithography; electron-beam lithography; atomic force microscope (AFM); nanofabrication with an AFM.

Requirements:
Syllabus of lectures:
Syllabus of tutorials:
Study Objective:
Study materials:

Wolf,E.L.: Nanophysics and Nanotechnology. Wiley-VCH,2004. Bhushan,B.: Handbook of Nanotechnology. Springer-Verlag,Berlin,2004

Note:
Time-table for winter semester 2020/2021:
Time-table is not available yet
Time-table for summer semester 2020/2021:
Time-table is not available yet
The course is a part of the following study plans:
Data valid to 2020-09-20
For updated information see http://bilakniha.cvut.cz/en/predmet10868102.html